Adhesion Strength. Adhesion of Magnetic Thin Films by Sputtering.
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چکیده
منابع مشابه
Mechanical Properties and Microstructural Evolution of Ta/TaNx Double Layer Thin Films Deposited by Magnetron Sputtering
Crystalline tantalum thin films of about 500nm thickness were deposited on AISI 316L stainless steel substrate using magnetron sputtering. To investigate the nano-mechanical properties of tantalum films, deposition was performed at two temperatures (25°C and 200°C) on TaNx intermediate layer with different N2/Ar flow rate ratio from 0 to 30%. Nano-indentation was performed to obtain the mechani...
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ژورنال
عنوان ژورنال: Journal of the Surface Finishing Society of Japan
سال: 1997
ISSN: 0915-1869,1884-3409
DOI: 10.4139/sfj.48.678